Analysis of Thermal Characteristic for Wiring at Heater Connector of Semiconductor Chiller Equipment 


Vol. 38,  No. 3, pp. 27-34, Jun.  2023
10.14346/JKOSOS.2023.38.3.27


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  Abstract

With the technological development of the semiconductor industry, the roles of electrical and thermal energy supply and control of semiconductor equipment in ultrafine processes have become very important. However, instances of electrical fires in the chiller heater, which is used for cooling in the semiconductor manufacturing process, are increasing. A fire occurs in combustibles due to high heat at the connection part of the chiller heater, that is, when the number of electrical wires in the connection part is reduced or when the wires are completely disconnected. In this study, the temperature characteristics were compared and analyzed through experiments and 3D simulations. The number of electrical wires, which is the connection part of the chiller heater, was reduced by 90%, 50%, 30%, 10%, and 5%, and the wires were completely disconnected. When the number of electrical wires was reduced by 5%, heat of up to 80

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  Cite this article

[IEEE Style]

김규빈, 김두현, 김성철, "Analysis of Thermal Characteristic for Wiring at Heater Connector of Semiconductor Chiller Equipment," Journal of the Korean Society of Safety, vol. 38, no. 3, pp. 27-34, 2023. DOI: 10.14346/JKOSOS.2023.38.3.27.

[ACM Style]

김규빈, 김두현, and 김성철. 2023. Analysis of Thermal Characteristic for Wiring at Heater Connector of Semiconductor Chiller Equipment. Journal of the Korean Society of Safety, 38, 3, (2023), 27-34. DOI: 10.14346/JKOSOS.2023.38.3.27.

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