Effects of Hydrophilic and Hydrophobic Surface Properties of Poly(imide) Films on Particle Adhesion and Removal
Vol. 52, No. 4, pp. 232-241, Aug. 2015
10.12772/TSE.2015.52.232
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PI film O2 and CHF3 plasma hydrophilicity and hydrophobicity Contact angle surfactant adsorption particles adhesion and removal
Abstract
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