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Optimization of CMP Filter Layered Structure for Slurry Filtration of Less than 1 Micron
Hyo-Jung Chae Kyung-Do Kim Sam-Soo Kim
Vol. 60, No. 5, pp. 313-320, Oct. 2023
10.12772/TSE.2023.60.313
Vol. 60, No. 5, pp. 313-320, Oct. 2023
10.12772/TSE.2023.60.313