Flow behavior at the embossing stage of nanoimprint lithography
Vol. 3, No. 3, pp. 113-119, Sep. 2002
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Cite this article
[IEEE Style]
J. Jeong, Y. Choi, Y. Shin, J. Lee, K. Park, E. Lee, Sang-Rok, "Flow behavior at the embossing stage of nanoimprint lithography," Fibers and Polymers, vol. 3, no. 3, pp. 113-119, 2002. DOI: fipo-2002-3-3-113.
[ACM Style]
Jun-Ho Jeong, Youn-Suk Choi, Young-Jae Shin, Jae-Jong Lee, Kyoung-Taik Park, Eung-Sug Lee, and Sang-Rok. 2002. Flow behavior at the embossing stage of nanoimprint lithography. Fibers and Polymers, 3, 3, (2002), 113-119. DOI: fipo-2002-3-3-113.