Analysis of Thermal and Electrical Signals caused by torque Failure in Electrical Connections of Heater and Motor of Semiconductor Chiller Equipment 


Vol. 39,  No. 5, pp. 24-33, Oct.  2024
10.14341/JKOSOS.2024.39.5.24


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  Abstract

This study focused on chillers installed to regulate the temperature produced by controlled reactions on wafer surfaces during semiconductor fabrication. The increasing demand for AI applications and the expansion of domestic production are driving the installation and adaptation of chiller systems. A fire incident occurred in a debug chiller. To prevent future problems, the electrical and thermal anomalies in the heater and motor components must be analyzed. The heater and motor components analyze the independent patterns, actual values, and electrical signals, including the Bluetooth and thermal characteristics of the position points associated with the switch that controls the O-ring and screw parts of each electrical connection. The results revealed that the change in power spectrum and THD during an arc caused by a poor electrical connection was 18% higher than normal. Regarding thermal signals, the heater’s load capacity was high. As a result, the connection was faulty, and the heat generated exceeded normal levels 19 times. Therefore, it is necessary to reconfigure the current system by integrating a frequency range that detects poor connections in the critical components of semiconductor chiller equipment, specifically the heater and motor.

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  Cite this article

[IEEE Style]

김규빈, 김두현, 김성철, "Analysis of Thermal and Electrical Signals caused by torque Failure in Electrical Connections of Heater and Motor of Semiconductor Chiller Equipment," Journal of the Korean Society of Safety, vol. 39, no. 5, pp. 24-33, 2024. DOI: 10.14341/JKOSOS.2024.39.5.24.

[ACM Style]

김규빈, 김두현, and 김성철. 2024. Analysis of Thermal and Electrical Signals caused by torque Failure in Electrical Connections of Heater and Motor of Semiconductor Chiller Equipment. Journal of the Korean Society of Safety, 39, 5, (2024), 24-33. DOI: 10.14341/JKOSOS.2024.39.5.24.

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